Entry name：Manufacturing method of diamond nanopillar
Format	Brokered IP Deals
Industry	Specialized Products
IP Holder	City University Hong Kong
IP Originator	--
Entry name	Manufacturing method of diamond nanopillar
Registration ID	美國專利號：US8101526 B2
Region	175
Application Date	2022-06-06 00:00:00
Grant Date	2022-12-31 00:00:00
Project Location	ChinaHong Kong

City University of Hong Kong, or CityU for short, was founded in 1984, formerly known as the City Polytechnic of Hong Kong, and was upgraded to City University of Hong Kong in 1994. Each year, CityU offers about 130 high-quality undergraduate and research degree courses of different levels and majors to about 20000 students. The university now has schools of business, humanities and Social Sciences, science and engineering, creative media, energy and environment, and law. Apart from the school of energy and environment, the above-mentioned colleges are now open to the mainland. More than 48% of the nearly 600 outstanding professors from 30 countries, including fields and Wolff prize winners, 10 world-class academicians, 12 Yangtze scholars, 17 members of the international society of electrical and Electronic Engineering (IEEE), 6 Fulbright Fulbright senior scholars, and 5 Croucher Most of them hold doctorates from well-known overseas universities, and have long held full-time teaching and research positions in overseas universities. For six consecutive years (2004-2009), CityU has been selected as one of the 200 best universities in the world in the times higher education supplement. From 2007 to 2009, CityU was also selected as one of the 150 best universities in the world. In 2009, CityU jumped to 124. CityU ranked 18 in the list of Asian universities. CityU ranked in the international higher education information institution quacquarelli symbols In 2010, the world university ranked 129, the Asian University ranked 15, the social sciences of CityU ranked 105, and the humanities, engineering and information technology ranked 107.

Technology	Diamond is a reliable material for the production of electronic and MEMS devices, but its surface area must be increased to improve its efficiency in the application of electrodes and sensors. To meet this demand, researchers at CityU have developed a method to produce nanopillars and arrays. The core of a diamond is formed on a semiconductor or metal substrate, on which a thin layer of diamond is formed. A metal mask will be deposited on the diamond layer, and then the diamond layer with the mask will be etched to form a nanopillar.
Advantages	The pattern of the etching mask can be specified to form the desired diamond nanopillar array. Because the size of colloidal metal particles can be selected, etching masks with very narrow size distribution and specified size can be formed. The density, height and diameter of the nanocolumn can be adjusted
Possible applications	For electrodes, biosensors and field emission devices
Category	Nanotechnology